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Carrier phase distribution based scan step noise correction for white light interferometry topography measurements

Optics and Lasers in Engineering, ISSN: 0143-8166, Vol: 169, Page: 107730
2023
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Article Description

As a type of interference microscopy, white light interferometry (WLI) is well-established measuring technique in advanced manufacturing industry and scientific research for contactless inspection of surface topographies in micro- and nanometer range. In this paper, a scan step noise correction based surface recovery algorithm is proposed for WLI precision measurement, which provides an effective solution to the inevitable scan step noise. The carrier is firstly obtained by removing the envelope in the interference signal, then the carrier phase is extracted. Based on the theoretical linearity of the phase distribution, a corrected relationship is designed in terms of scan position and phase distribution. Afterwards, the surface profiles can be precisely recovered according to the regenerated carrier after phase correction simultaneously. Simulations show that the reconstruction error is less than 5 nm when WLI is disturbed by harmonic error and random noise. In order to test the effectiveness and reliability of the proposed, a step height with nominal value 45.5 ± 1.2 nm is used to calibrate the proposed system and the new algorithm, where within 10 rounds of scanning the mean height of 44.99 nm with the repeatability of 1.39% is achieved. In the experiment, a laser marking sample is measured and the 3D shape of the marking area is successfully recovered. The repeat measurements and the comparison with the commercial profiler are also provided, which exhibits good consistence and further proves the potential of the new method in the perspective of industry applications.

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