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Compositional analysis of the rhodium metal-oxide interface by imaging atom-probe mass spectroscopy

Applied Physics Letters, ISSN: 0003-6951, Vol: 51, Issue: 2, Page: 100-102
1987
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The chemical composition of a thin rhodium oxide from the surface through the metal-oxide interface has been measured by imaging atom-probe mass spectroscopy. The surface oxide was produced by heating a clean, well-characterized field-emitter surface to 600 K in 1 Torr O for 15 min. The oxidized sample was subsequently transferred under ultrahigh vacuum to an imaging atom probe for analysis. To avoid problems associated with a nonuniform oxide layer, only a small volume of the oxide layer was mass analyzed. The results indicated that under these conditions 50-60 layers of stoichiometric RhO are produced with dissolved oxygen (possibly mixed with substoichiometric oxides) extending an additional 5-15 layers into the bulk. A small amount of HO was detected within the oxide with an enhanced concentration observed at the interface.

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