PlumX Metrics
Embed PlumX Metrics

Buried interfaces in Mo/Si multilayers studied by soft-X-ray emission spectroscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, ISSN: 0021-4922, Vol: 38, Issue: 11, Page: 6476-6478
1999
  • 30
    Citations
  • 0
    Usage
  • 2
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    30
    • Citation Indexes
      30
  • Captures
    2

Article Description

We measured the Si L soft-X-ray emission spectra for Mo/Si multilayers using monochromatized synchrotron radiation near the Si L absorption threshold. On the basis of the spectral analysis, it was determined that the interfaces of Mo/Si multilayers consist of MoSi interlayers of 0.8±0.1 nm in thickness. This study confirmed that soft-X-ray emission spectroscopy is a useful method of studying buried layers and interfaces nondestructively.

Provide Feedback

Have ideas for a new metric? Would you like to see something else here?Let us know