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Accurate measurement of capture cross sections in deep level transient spectroscopy: Application to EL2 in GaAs

Journal of Electronic Materials, ISSN: 0361-5235, Vol: 24, Issue: 10, Page: 1461-1464
1995
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Article Description

A rigorous formulation of capacitance changes during trap filling processes is presented and used to accurately determine the electron capture cross section of EL2 in GaAs at a particular temperature, 377K, in this case. The value, σ (377K) = 2.7 × 10 cm, is compared with that predicted from the emission dependence. © 1995 The Metallurgical of Society of AIME.

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