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SAMPLEMASKINGINELLIPSOMETERAND THE LIKE SYSTEMS INCLUDING DETECTION OF SUBSTRATE BACKSIDEREFLECTIONS

2009
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Article Description

A system and method of preventing substrate backside reflected components in a beam of electromagnetic radiation caused to reflect from the surface of a sample in an ellipsometer or polarimeter system, involving placing a mask adjacent to the surface of the sample which allows electromagnetic radiation to access the sample over only a limited area, wherein to access the sample over only a limited area, wherein the mask can include detector elements for collecting electromagnetic radiation reflected from the sample backside.

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