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Direct Determination of Interface Trapped Charges

1991
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Article Description

A technique to determine the interface trapped charge, Qit, from C-V and I-V measurements is introduced. This Qit technique is free from the assumptions used in the conventional methods for determining the density of interface traps, Dit. The technique is applied to current-stressed metal-oxide-semiconductor (MOS) capacitors with different oxide thicknesses and found to be useful in revealing donor- and acceptor-type characteristics of interface traps.

Bibliographic Details

Cary Y. Yang; Hiroshi Inokawa; Felino E. Pagaduan

IOP Publishing

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