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Growth and Structure of Nanocrystalline ZrO2:Y Thin Films

Ceramic Engineering and Science Proceedings, Vol: 20, Issue: 3, Page: 135-144
1999
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Article Description

The results of studies of the preparation and structure of ZrO2:16%Y thin films are presented. Dense films with 1-300 nm grain size have been obtained on polycrystalline Al2O3 and monocrystal sapphire substrates using a polymeric precursor spin coating technique. The relationship between the microstructure and processing parameters has been determined and discussed. The results of Raman scattering and optical absorption are presented and correlated with the microstructure of ZrO2:16%Y thin films. The quantum confinement effects were observed for the grain size smaller than 100 nm.

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