Growth and electrical characterization of ultra-dense phosphorous delta-doping layers in silicon

Publication Year:
2001
Usage 2
Abstract Views 2
Repository URL:
https://digitalcommons.usu.edu/physics_facpub/1945
Author(s):
Shen, T. -C.
Publisher(s):
AVS
Tags:
growth; electrical characterization; phosphorous; delta-doping; silicon
lecture / presentation description
By T. -C. Shen, Published on 10/30/01