Process Development for Porous Silicon Light-Emitting Devices

Citation data:

Vol: 8, Issue: 1

Publication Year:
1998
Usage 6
Downloads 6
Repository URL:
https://scholarworks.rit.edu/ritamec/vol8/iss1/6
Author(s):
Benz, Jason
Tags:
Process Development; Porous Silicon Light-Emitting Devices; Engineering
paper description
The primary focus of this project was to continue process development of integrated PSibased (porous silicon) LEDs. Porous silicon is a light-emitting material formed by electrochemical etching of the silicon substrate, resulting in the formation of pores and wire-like silicon structures [1]. This study investigates new strategies in the effort to advance the implementation of PSi-based LEDs with standard CMOS technology by providing devices that are substrate-based, electrically isolated, array-addressable and voltage modulated. Existing problems with porous silicon LEDs include high bias operation, low external quantum efficiency (EQE), and poor stability. This work has resulted in the fabrication of LEDs with significantly improved performance, however further device optimization is required.