High-density impedance-sensing array on complementary metal-oxide-semiconductor circuitry assisted by negative dielectrophoresis for single-cell-resolution measurement

Citation data:

Sensors and Actuators B: Chemical, ISSN: 0925-4005, Vol: 266, Page: 106-114

Publication Year:
2018
Captures 6
Readers 6
Repository URL:
http://scholarworks.unist.ac.kr/handle/201301/24008
DOI:
10.1016/j.snb.2018.03.113
Author(s):
Chung, Jaehoon; Chen, Yu; Kim, Seong-Jin
Publisher(s):
Elsevier BV; ELSEVIER SCIENCE SA
Tags:
Materials Science; Physics and Astronomy; Engineering; Impedance sensor; CMOS IC; Dielectrophoresis; High-density; Single-cell resolution; 2D microelectrode array
article description
A microarray biosensor that measures the electrical impedance of cell suspensions is presented. Single-cell–resolution measurement was facilitated by physically positioning individual cells on sensing electrodes by dielectrophoresis, obviating chemical or biological surface modification. The high-density (104 × 104) electrode array was incorporated with a complementary metal-oxide-semiconductor (CMOS) integrated chip (IC) to support impedance spectroscopy at frequencies ranging from 100 kHz to 1 MHz, achieving a rapid and cost-effective platform with a small form factor. Experiments with microbeads (10, 15, and 20 μm in diameter) and a live breast cancer cell line (MCF-7) have demonstrated that the developed prototype quantifies loaded microbeads or cells rapidly (<1 min), with a mapping accuracy over 95%, showing good agreement with optical observation. In addition, a new impedance model of a cancer cell suspended in buffer media was constructed to interpret the measurement results, and the simulation results obtained with the model showed good agreement with the experimental results.