Nano-CNC Machining of Sub-THz Vacuum Electron Devices

Citation data:

IEEE Transactions on Electron Devices, ISSN: 0018-9383, Vol: 63, Issue: 10, Page: 4067-4073

Publication Year:
2016
Usage 126
Abstract Views 123
Link-outs 3
Captures 14
Readers 8
Exports-Saves 6
Citations 5
Citation Indexes 5
Repository URL:
http://scholarworks.unist.ac.kr/handle/201301/20471
DOI:
10.1109/ted.2016.2594027
Author(s):
Gamzina, Diana, Himes, Logan G., Barchfeld, Robert, Zheng, Yuan, Popovic, Branko K., Paoloni, Claudio, Choi, EunMi, Luhmann, Neville C.
Publisher(s):
Institute of Electrical and Electronics Engineers (IEEE), IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Tags:
Materials Science, Engineering, vacuum electron device (VED), High frequency, micromachining, nano-computer numerical control (CNC), terahertz
article description
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.

This article has 0 Wikipedia mention.