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Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond

Advanced Materials, ISSN: 0935-9648, Vol: 17, Issue: 20, Page: 2427-2430
2005
  • 168
    Citations
  • 0
    Usage
  • 113
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    168
    • Citation Indexes
      167
    • Patent Family Citations
      1
      • Patent Families
        1
  • Captures
    113

Article Description

A method for the fabrication of freestanding microstructures in bulk single-crystalline diamond was developed. The method takes advantage of the fact that ion irradiation of diamond followed by thermal annealing induces a phase transformation to amorphous carbon. MeV ion implantation followed by thermal annealing to create a buried sacrificial layer at a well-defined depth was also carried out in the method. Patterned milling with a focused ion beam (FIB) was used to expose defined regions of the sacrificial layer to selective chemical etching. The method has also great potential for the production of microresonators, beams for integration in MEMS with waveguide sensing, and whole classes of high-performance devices.

Bibliographic Details

Paolo Olivero; Sergey Rubanov; Patrick Reichart; Brant C. Gibson; Shane T. Huntington; James Rabeau; Andrew D. Greentree; David N. Jamieson; Steven Prawer; Joseph Salzman; David Moore

Wiley

Materials Science; Engineering

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