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Influence of oxide thinning by selective etching process on solution processed indium zinc oxide thin film transistor

Digest of Technical Papers - SID International Symposium, ISSN: 2168-0159, Vol: 47, Issue: 1, Page: 1165-1167
2016
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Conference Paper Description

Conductive indium zinc oxide (IZO) film was fabricated using solution process. After source/drain deposition on the IZO film, we immersed the IZO thin film transistor (TFT) into acetic acid solution to selectively etch the area between source and drain. By this selective etching, the IZO TFT showed proper transfer characteristics.

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