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Advanced Planarization Techniques

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications, Page: 459-475
2009
  • 2
    Citations
  • 0
    Usage
  • 1
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    2
    • Citation Indexes
      2
      • CrossRef
        2
  • Captures
    1

Book Chapter Description

Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications

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