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Metrology with synchrotron radiation

Synchrotron Light Sources and Free-Electron Lasers: Accelerator Physics, Instrumentation and Science Applications, Page: 1575-1610
2020
  • 2
    Citations
  • 0
    Usage
  • 11
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    2
    • Citation Indexes
      2
  • Captures
    11

Book Chapter Description

Metrology with synchrotron radiation covers a wide range of tasks from radiometry to quantitative materials research. This chapter provides an overview of activities, methods and facilities in this field. In particular, the measurement capabilities of the Physikalisch-Technische Bundesanstalt (PTB) are presented with the storage rings BESSY II and MLS as primary source standards and cryogenic radiometers as primary detector standards. The applications relate to the characterization of space instruments and optics for EUV lithography, FEL photon diagnostics, nanometrology and material characterizations for semiconductor electronics, photovoltaics, energy storage, catalysis, or biotechnology.

Bibliographic Details

Mathias Richter; Gerhard Ulm

Springer Science and Business Media LLC

Physics and Astronomy; Engineering; Materials Science; Chemistry; Medicine; Biochemistry, Genetics and Molecular Biology

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