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Epitaxy for III-N-based electronic devices

Springer Series in Materials Science, ISSN: 2196-2812, Vol: 96, Page: 91-138
2008
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    Citations
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  • 17
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Metrics Details

  • Citations
    1
    • Citation Indexes
      1
  • Captures
    17

Book Chapter Description

For epitaxial growth, both the aluminum and indium-based binary and ternary compounds are described with emphasis on AlGaN/GaN and In--Ga--N-based heterostructure systems in the third chapter. Epitaxial growth techniques such as molecular beam epitaxy (MBE) and metal organic chemical vapor deposition (MOCVD) is analyzed systematically. Nitride-specific material characterization, doping, and material quality issues are analyzed. Substrate properties are reviewed systematically with respect to electronic requirements.

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