Test object for emission electron microscope
Applied Physics A: Materials Science and Processing, ISSN: 0947-8396, Vol: 114, Issue: 4, Page: 1383-1385
2014
- 5Citations
- 7Captures
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Article Description
The resolution of emission electron microscopes approaches some nanometers, which leads to the need for new test objects. Microfields, which are almost always present at the sample surface, deform the trajectories of electrons forming the image. This leads to a distortion of the emission electron microscopy image and a decrease of lateral resolution. We propose a test object, where the influence of microfields conditioned by contact potential differences is compensated by a specially shaped relief of the sample surface. © 2013 Springer-Verlag Berlin Heidelberg.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84897670532&origin=inward; http://dx.doi.org/10.1007/s00339-013-8010-y; http://link.springer.com/10.1007/s00339-013-8010-y; http://link.springer.com/content/pdf/10.1007/s00339-013-8010-y; http://link.springer.com/content/pdf/10.1007/s00339-013-8010-y.pdf; http://link.springer.com/article/10.1007/s00339-013-8010-y/fulltext.html; https://dx.doi.org/10.1007/s00339-013-8010-y; https://link.springer.com/article/10.1007/s00339-013-8010-y
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