A high-force and high isolation metal-contact RF MEMS switch
Microsystem Technologies, ISSN: 0946-7076, Vol: 23, Issue: 10, Page: 4699-4708
2017
- 9Citations
- 10Captures
Metric Options: Counts1 Year3 YearSelecting the 1-year or 3-year option will change the metrics count to percentiles, illustrating how an article or review compares to other articles or reviews within the selected time period in the same journal. Selecting the 1-year option compares the metrics against other articles/reviews that were also published in the same calendar year. Selecting the 3-year option compares the metrics against other articles/reviews that were also published in the same calendar year plus the two years prior.
Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Article Description
A simple structure, high-force and high isolation metal contact RF MEMS switch was fabricated based on micro electroplating technology, and the mechanical and RF performance of the switch were measured. After release and annealing, the switch’s cantilever beam showed a tip-up of less than 1 µm over the beam length of 485 µm, indicating a good stress control and thermal stability of the electroplated gold. The pull-in voltage and the switching characteristics at different temperatures, ranging from 25 to 90 °C, were investigated. A fast, stable and temperature independent switching process was observed as the actuation voltage was 10% larger than the pull-in voltage. Based on the classical cantilever beam model, both the electrostatic actuation force and the return force of the switch were larger than 1000 μN, and the extracted effective spring constant of the free-standing beam was 718 N/m. Cold RF tests were carried out at various temperatures by a network analyzer, and we found that temperature showed very less influence on the insertion and isolation of the switch in the present case. At 25 °C, the insertion loss was −0.13 dB at 10 GHz, and was lower than −0.3 dB over the 0.05−20 GHz frequency range. The isolation was −36 dB at 10 GHz, and was higher than −27 dB over the entire scanning frequency range. The high isolation performance is consistent with a lumped-element equivalent circuit analysis of the switch.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85011536636&origin=inward; http://dx.doi.org/10.1007/s00542-017-3302-3; http://link.springer.com/10.1007/s00542-017-3302-3; http://link.springer.com/content/pdf/10.1007/s00542-017-3302-3.pdf; http://link.springer.com/article/10.1007/s00542-017-3302-3/fulltext.html; https://dx.doi.org/10.1007/s00542-017-3302-3; https://link.springer.com/article/10.1007/s00542-017-3302-3
Springer Nature
Provide Feedback
Have ideas for a new metric? Would you like to see something else here?Let us know