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A SERS study of the galvanostatic sequence used for the electrochemical deposition of copper from baths employed in the fabrication of interconnects

Journal of Materials Science: Materials in Electronics, ISSN: 0957-4522, Vol: 20, Issue: 3, Page: 217-222
2009
  • 14
    Citations
  • 0
    Usage
  • 9
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    14
    • Citation Indexes
      14
  • Captures
    9

Article Description

This paper reports the first study carried out by surface-enhanced Raman spectroscopy (SERS) during the galvanostatic electrodeposition (ECD) of copper from an acidic sulphate solution, in the presence of polyethylene glycol (PEG), bis-(3-sulfopropyl)-disulfide Na salt (SPS), benzyl-phenyl modified polyethyleneimine (BPPEI) and chloride ions. The analysis of SERS spectra recorded during electrodeposition allowed to get an insight into the complex interfacial behaviour of the organic blend, in terms of co-adsorption and reactivity. At open-circuit (OC), the additives co-adsorb on the copper cathode. Upon increasing the cathodic polarization, progressive SPS-scavenging action of PEG was observed. BPPEI is adsorbed in the entire process window and cathodic reaction products of PEG were identified. The joint action of the organic additives yields a continuous deposit with crystallites of submicron dimensions, as revealed by Scanning electron microscopy (SEM). © Springer Science+Business Media, LLC 2008.

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