Textures induced by a femtosecond laser on silicon surfaces under various environments
Journal of Russian Laser Research, ISSN: 1573-8760, Vol: 33, Issue: 4, Page: 349-355
2012
- 6Citations
- 4Captures
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Article Description
We employ an ultrafast laser with 1 kHz repetition rate and 130 fs pulse width to fabricate micro/nanotextures and unique surface structures on silicon surfaces under different environments. First, we study the effect of vacuum and fabricate micro-spike structures at 800 nm wavelength and a pressure of 4 · 10 Pa. We observe even sub-100 nm ripple structures on micro-spikes after 800 nm laser irradiation in distilled water because the produced bubbles are expelled from the chamber. Finally, we show that submicron-spike structures fabricated after 400 nm laser irradiation in distilled water are smaller than those in vacuum.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85027936697&origin=inward; http://dx.doi.org/10.1007/s10946-012-9289-4; http://link.springer.com/10.1007/s10946-012-9289-4; http://link.springer.com/content/pdf/10.1007/s10946-012-9289-4; http://link.springer.com/content/pdf/10.1007/s10946-012-9289-4.pdf; http://link.springer.com/article/10.1007/s10946-012-9289-4/fulltext.html; https://dx.doi.org/10.1007/s10946-012-9289-4; https://link.springer.com/article/10.1007%2Fs10946-012-9289-4; http://www.springerlink.com/index/10.1007/s10946-012-9289-4; http://www.springerlink.com/index/pdf/10.1007/s10946-012-9289-4
Springer Science and Business Media LLC
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