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Investigation of Rotating Arc-Catalytic Reactor for CF Removal with High Energy Efficiency

Plasma Chemistry and Plasma Processing, ISSN: 1572-8986, Vol: 42, Issue: 6, Page: 1311-1327
2022
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Article Description

CF is commonly used in semiconductor industries, and its removal requires a large amount of energy because it is a highly stable perfluorinated compound. In this study, a rotating arc-catalytic reactor that uses thermal plasma as the heat source for catalysts is introduced as an efficient method for CF removal. An AC rotating arc plasma was used with the catalyst for CF removal, and the plasma and catalyst were configured serially in this reactor. Destruction and removal efficiency (DRE) of CF and the energy efficiency of the removal process were experimentally investigated in the input power range of 2–3 kW and a steam-to-CF molar ratio of up to 20. The obtained results suggest that the DRE of CF was up to 98% and the energy efficiency was as high as 36.1 g/kWh, which is approximately 3.5 times higher than that obtained using a rotating arc reactor alone. In addition, the thermal efficiency was estimated to be approximately 67%, based on the temperatures of the inlet and outlet gases of the rotating arc-catalytic reactor. Thus, further improvement in the performance can be expected through subsequent thermal management and system optimization. These results confirm that using rotating arc-catalytic reactors is an energy-efficient strategy for application as scrubber systems to remove CF.

Bibliographic Details

Sungkwon Jo; Donghyun Cho; Dae Hoon Lee; Woo Seok Kang

Springer Science and Business Media LLC

Chemistry; Chemical Engineering; Physics and Astronomy; Materials Science

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