The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target

Anomalous erosion can happen, in the erosion sections of a rectangular target, resulting in, lower usage of the target. To determine the cause of anomalous erosion, we performed a series of simulations describing the strong and weak magnet field regions for all sections erosion. We found that no-uniform distribution of the magnetic field on the target surface causes the anomalous erosion. To make erosion profile more uniform, we proposed to improve magnets design. Through the 3D-simulation model, the approach of magnets design improvement is verified. We found that making the perpendicular magnetic field distribution more uniform within 10% on the erosion sections, the predicted erosion profile can be better controlled and made more uniform. The target erosion profile is predicted using a non-self-consistent particle simulation where tracing the complex trajectories of magnetized electrons within the magnetic trap and non-magnetized ions that naturally bombard the target surface. The obtained simulation results are consistent with the actual situation in the experimental results and measured data, at least in the relative sense correct in terms of normal erosion profiles, measurement of magnetic field strength on the target surface and erosion depth measurement. The model can provide the total mass lost from target, and service life.