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Metal silicides: An integral part of microelectronics

JOM, ISSN: 1047-4838, Vol: 57, Issue: 9, Page: 24-30
2005
  • 170
    Citations
  • 0
    Usage
  • 91
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    170
    • Citation Indexes
      170
  • Captures
    91

Article Description

This article presents an overview of the recent developments in the\nfundamental understandings and microelectronics applications of metal\nsilicides. The synthesis and characterization of nanoscale silicides\nwith potential applications in nanotechnology are reviewed.

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