Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature
Rare Metals, ISSN: 1001-0521, Vol: 30, Issue: 2, Page: 170-174
2011
- 12Citations
- 3Captures
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Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
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Metrics Details
- Citations12
- Citation Indexes12
- 12
- CrossRef8
- Captures3
- Readers3
Article Description
Zinc oxide (ZnO) thin films were deposited on sapphire (0001) substrates at room temperature by radiofrequency (RF) magnetron sputtering at oxygen gas contents of 0%, 25%, 50% and 75%, respectively. The influence of oxygen gas content on the structural and optical properties of ZnO thin films was studied by a surface profile measuring system, X-ray diffraction analysis, atomic force microscopy, and UV spectrophotometry. It is found that the size of ZnO crystalline grains increases first and then decreases with the increase of oxygen gas content, and the maximum grain size locates at the 25% oxygen gas content. The crystalline quality and average optical transmittance (>90%) in the visible- light region of the ZnO film prepared at an oxygen gas content of 25% are better than those of ZnO films at the other contents. The obtained results can be attributed to the resputtering by energetic oxygen anions in the growing process. © The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2011.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=79958790088&origin=inward; http://dx.doi.org/10.1007/s12598-011-0219-3; http://link.springer.com/10.1007/s12598-011-0219-3; http://link.springer.com/content/pdf/10.1007/s12598-011-0219-3; http://link.springer.com/content/pdf/10.1007/s12598-011-0219-3.pdf; http://link.springer.com/article/10.1007/s12598-011-0219-3/fulltext.html; http://www.springerlink.com/index/10.1007/s12598-011-0219-3; http://www.springerlink.com/index/pdf/10.1007/s12598-011-0219-3; http://sciencechina.cn/gw.jsp?action=cited_outline.jsp&type=1&id=4154079&internal_id=4154079&from=elsevier; https://dx.doi.org/10.1007/s12598-011-0219-3; https://link.springer.com/article/10.1007/s12598-011-0219-3
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