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Structural characterization of superconducting YBa 2 Cu 3 O x films grown by pulsed laser ablation

Physica C: Superconductivity, ISSN: 0921-4534, Vol: 180, Issue: 1, Page: 94-97
1991
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Epitaxial YBa 2 Cu 3 O x superconducting films have been grown in-situ by XeCl excimer laser ablation of a sintered pellet. The films, 1000–1500 Å thick, were deposited on monocrystalline SrTiO 3, LaAlO 3, MgO and YSZ substrates. X-ray diffraction and RBS-channeling techniques were used for the structural analysis of the substrates and of the films.

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