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Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem

Sensors and Actuators A: Physical, ISSN: 0924-4247, Vol: 132, Issue: 1, Page: 90-97
2006
  • 27
    Citations
  • 0
    Usage
  • 11
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    27
    • Citation Indexes
      27
  • Captures
    11

Article Description

A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of ±50 μT with a sensitivity of 0.45 mV/μT.

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