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Influence of helium metastable states on the E-H mode transition in an inductively coupled plasma

Current Applied Physics, ISSN: 1567-1739, Vol: 36, Page: 137-142
2022
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A helium (He) inductively coupled plasma (ICP) source combined with two diode laser systems with the wavelengths of 396.5 nm (2 1 S–4 1 P) and 1082.9 nm (2 3 S–2 3 P) was configured to investigate the influence of He metastable states on the E-H mode transition. The population densities of 2 1 S and 2 3 S states were measured by laser absorption spectroscopy as the functions of RF power, He pressure, and the distance from RF antenna. Correlations between the E-H mode transition and the population density ratio of the 2 3 S metastable state to the 2 1 S metastable state as well as the line intensity ratio (LIR) of the 3 3 D-2 3 S transition to the 3 1 P–2 1 S transition were investigated. The E-H mode transition of He ICP was analyzed by the electron impact ionization rate and it was confirmed that the 2 3 S metastable state plays a key role in the E-H mode transition.

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