Aerosol deposition of alumina films on microstructured silicon substrates
Ceramics International, ISSN: 0272-8842, Vol: 49, Issue: 13, Page: 21570-21576
2023
- 8Citations
- 8Captures
- 1Mentions
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Most Recent News
Findings on Ceramics Research Detailed by Investigators at National Institute of Advanced Industrial Science and Technology (NIAIST) (Aerosol Deposition of Alumina Films On Microstructured Silicon Substrates)
2023 JUL 13 (NewsRx) -- By a News Reporter-Staff News Editor at Japan Daily Report -- Current study results on Technology - Ceramics Research have
Article Description
Aerosol deposition (AD) is a room-temperature ceramic coating method, which has been used for many applications. Various substrates, such as metals and ceramics, have been used depending on the application, but it is not clear how the substrate microstructure affects the deposition processes and film quality. In this study, AD alumina films deposited on silicon substrates with microstructures consisting of line and space patterns were systematically investigated. The films were formed along the microstructure on the substrate when the linewidth was much larger than the grain size of the raw powder. Conversely, on narrow-linewidth substrates, the films were supported by the lines and the spaces were sealed. The effect of the substrate microstructure was analyzed in terms of the residual stress of the films.
Bibliographic Details
http://www.sciencedirect.com/science/article/pii/S0272884223008921; http://dx.doi.org/10.1016/j.ceramint.2023.03.293; http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85152395635&origin=inward; https://linkinghub.elsevier.com/retrieve/pii/S0272884223008921; https://dx.doi.org/10.1016/j.ceramint.2023.03.293
Elsevier BV
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