Effect of pulse interval on deposition of diamond-like carbon through high-power impulse magnetron sputtering
Diamond and Related Materials, ISSN: 0925-9635, Vol: 148, Page: 111424
2024
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Article Description
A diamond-like carbon (DLC) film was deposited using unipolar-double-pulse high-power pulsed magnetron sputtering, aimed at enhancing both film density and deposition rate. The pulse interval between the 1st and 2nd pulses, with negative polarity applied to the target, was varied from 15 to 200 μs. Temporal variations in the flux and energy of C + and Ar + incident to the DLC film were analyzed through energy-resolved and time-resolved mass spectrometry to clarify the ion generation process during the 1st and 2nd pulses. The contribution of ionic species in forming the DLC film through HiPIMS was clarified through mass spectrometry, Raman scattering spectroscopy, and X-ray reflectivity analyses. Reducing the pulse interval increased the deposition rate, and the film density of the DLC film was improved at a pulse interval of approximately 40 μs. Overall, the implementation of a double pulse with the appropriate pulse interval can help enhance both the film density and deposition rate.
Bibliographic Details
http://www.sciencedirect.com/science/article/pii/S092596352400637X; http://dx.doi.org/10.1016/j.diamond.2024.111424; http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85198752625&origin=inward; https://linkinghub.elsevier.com/retrieve/pii/S092596352400637X; https://dx.doi.org/10.1016/j.diamond.2024.111424
Elsevier BV
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