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Top-down fabrication of diamond nanostructures

Diamond and Related Materials, ISSN: 0925-9635, Vol: 148, Page: 111535
2024
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Article Description

Diamond nanostructures can have exciting applications in electronics and thermal management, but their controlled fabrication can be challenging. Here, we present a top-down approach for the fabrication of diamond nanorod (DNR) clusters, via use of metal masks (Al, Ag, Au, and Cr) and reactive-ion etching (RIE). Prolonged RIE on Ag and Cr masks yields distinct etching profiles, and DNR clusters are selectively formed from Ag masks, with individual nanorods having dimensions of ∼100 nm diameter and ∼ 1.5 μm length. Detailed electron microscopy shows thin layer of amorphous carbon (a-C) around single crystalline DNR cores. Chemical analyses also show presence of oxygen on the surface of the DNRs. Fabrication of the DNR clusters with scalable top-down approach could lead to new nanodiamond-based applications.

Bibliographic Details

Chenxi Li; Tymofii Pieshkov; Zhaobo Mei; Mingfei Xu; Tao Li; Jishnu Murukeshan; Robert Vajtai; Yuji Zhao; Abhijit Biswas; Pulickel Ajayan

Elsevier BV

Materials Science; Chemistry; Engineering; Physics and Astronomy

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