Rapid surface roughness measurements of silicone thin films with different thicknesses
Optik, ISSN: 0030-4026, Vol: 123, Issue: 19, Page: 1755-1760
2012
- 3Citations
- 4Captures
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Article Description
A rapid optical measurement system for rapid surface roughness measurement of polycrystalline silicon (poly-Si) thin films was developed in this study. Two kinds of thickness of poly-Si thin films were used to study rapid surface roughness measurements. Six different incident angles were employed for measuring the surface roughness of poly-Si thin films. The results reveal that the incident angle of 20° was found to be a good candidate for measuring the surface roughness of poly-Si thin films. Surface roughness ( y ) of poly-Si thin films can be determined rapidly from the average value of reflected peak power density ( x ) measured by the optical system developed using the trend equation of y = −0.1876 x + 1.4067. The maximum measurement error rate of the optical measurement system developed was less than 8.61%. The savings in measurement time of the surface roughness of poly-Si thin films was up to 83%.
Bibliographic Details
http://www.sciencedirect.com/science/article/pii/S0030402611006851; http://dx.doi.org/10.1016/j.ijleo.2011.11.048; http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84865241386&origin=inward; https://linkinghub.elsevier.com/retrieve/pii/S0030402611006851; https://dul.usage.elsevier.com/doi/; https://api.elsevier.com/content/article/PII:S0030402611006851?httpAccept=text/xml; https://api.elsevier.com/content/article/PII:S0030402611006851?httpAccept=text/plain; https://dx.doi.org/10.1016/j.ijleo.2011.11.048
Elsevier BV
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