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Uniformity evaluation of lattice spacing of silicon crystals for the realization of the kilogram

Measurement: Sensors, ISSN: 2665-9174, Vol: 18, Page: 100204
2021
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Article Description

Uniformity of lattice spacing of 28 Si enriched single crystals was evaluated by the self-referenced lattice comparator (SRLC). Mapping measurements of the lattice spacing were performed for samples cut from the seed side of two 28 Si ingots produced recently by the Physikalisch-Technische Bundesanstalt (PTB) for the realization of the kilogram. Maps of lattice spacing distribution for these new crystals were analyzed and compared to those of the previous crystals. The new crystals had uniform distribution of lattice spacing.

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