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Formation and evolution of grain structures in thin films

Microelectronic Engineering, ISSN: 0167-9317, Vol: 76, Issue: 1, Page: 195-204
2004
  • 22
    Citations
  • 0
    Usage
  • 15
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    22
    • Citation Indexes
      22
  • Captures
    15

Article Description

We describe an approach to studying grain structure formation and evolution in polycrystalline thin films using a “grain continuum” representation of the solid. Formation and evolution of grain structure are tracked using level-set-based geometry software we call PLENTE. We demonstrate the approach using two processes; (1) vapor deposition and (2) grain boundary migration during curvature-driven coarsening. We employ several codes in concert to track the development of grains during deposition while accounting for reaction kinetics, ballistic transport, and re-emission of reactive species.

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