A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides
Microelectronic Engineering, ISSN: 0167-9317, Vol: 174, Page: 16-19
2017
- 11Citations
- 17Captures
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Article Description
We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~ 20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.
Bibliographic Details
http://www.sciencedirect.com/science/article/pii/S0167931716305093; http://dx.doi.org/10.1016/j.mee.2016.12.003; http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85006976062&origin=inward; https://linkinghub.elsevier.com/retrieve/pii/S0167931716305093; https://dx.doi.org/10.1016/j.mee.2016.12.003
Elsevier BV
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