Advanced spatial investigation of 3D nanoscale topography of DyMnO 3 thin films

We have synthesized DyMnO 3 thin films using a sol gel method. Our goal was to evaluate the spatial patterns of the films as a function of the annealing temperature. The results reveal that from 800 °C, the films present pure orthorhombic structure with decreasing of nanocrystal size. The topography shows that films sintered at higher temperatures have greater surface roughness, negative asymmetries, high kurtosis, high peak densities and pointed peak shapes. These films also have anisotropic surfaces and are dominated by low spatial frequencies than films sintered at lower temperatures. However, fractal parameters show the sample sintered at 800 °C has greater spatial complexity, less heterogeneous nanotexture, ideal surface porosity, and greater topographic uniformity. These results suggest the film sintered at 800 °C has spatial configuration with the best topographic features which can be of great interest for technological application, regarding the processing control of perovskite rare-earth oxides-based semiconductor films.