A PZT MEMS loudspeaker with a quasi-closed diaphragm
Sensors and Actuators A: Physical, ISSN: 0924-4247, Vol: 358, Page: 114454
2023
- 8Citations
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Article Description
Piezoelectric MEMS speakers with non-closed diaphragms are promising to generate high sound pressure levels (SPLs), but a serious diaphragm breakage issue exists. In this work, a novel piezoelectric MEMS loudspeaker with a quasi-closed diaphragm is proposed. The quasi-closed diaphragm consists of a diagonally-cut but center-linked diaphragm, that is coated with a thin layer of Parylene-C. Under the combined action of the stress dispersion structure, the application of the Parylene-C film prevents the diaphragm from breakage and significantly reduces the air loss. The MEMS loudspeaker with a small size of 2.5 × 2.5 mm 2 has been successfully fabricated and the acoustic performance has been characterized in an 711 ear simulator. The measured SPL reaches its maximum value of 124 dB at 11.8 kHz under a drive voltage of 4 V pp. The SPL is further increased to 88 dB in the low-frequency range (20–500 Hz) under a voltage of 35 V pp.
Bibliographic Details
http://www.sciencedirect.com/science/article/pii/S0924424723003035; http://dx.doi.org/10.1016/j.sna.2023.114454; http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85162821573&origin=inward; https://linkinghub.elsevier.com/retrieve/pii/S0924424723003035; https://dx.doi.org/10.1016/j.sna.2023.114454
Elsevier BV
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