Decomposition processes of diborane and borazane (ammonia-borane complex) on hot wire surfaces

The decomposition efficiencies of B 2 H 6 and H 3 NBH 3 activated on hot wire surfaces were measured mass spectrometrically. The decomposition efficiency of B 2 H 6 increased with the residence time of gases in the chamber, and decreased with total pressure when He was added. Decomposition efficiency was still high even under collision-free conditions. These results suggest that the decomposition is not thermal but catalytic, at least at low pressures, although the wire-material dependence of the decomposition efficiency was minor. The decomposition efficiency of H 3 NBH 3 vapor was higher than that of B 2 H 6 and increased with the addition of H 2. H 2, NH 3, and N 2 as well as H 2 NBH 2 were identified as stable decomposition products. These results indicate H 3 NBH 3 is a viable candidate as a safe dopant precursor for B-atom doping.