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Growth of GaN on highly mismatched substrate and its application to novel devices

Diamond and Related Materials, ISSN: 0925-9635, Vol: 8, Issue: 2, Page: 302-304
1999
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Crystallization process of the low-temperature-deposited AlN buffer layer on sapphire, and atomic step motion of the crystallized AlN has been observed in situ by TEM. Insertion of the second low-temperature-deposited buffer layer between high-temperature-grown GaN is found to reduce threading dislocations and to eradicate etch-pit formation.

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