PlumX Metrics
Embed PlumX Metrics

3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries

Journal of Materials Chemistry, ISSN: 0959-9428, Vol: 20, Issue: 18, Page: 3703-3708
2010
  • 65
    Citations
  • 0
    Usage
  • 78
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    65
    • Citation Indexes
      64
    • Patent Family Citations
      1
      • 1
  • Captures
    78

Article Description

The deposition feasibility and electrochemical evaluation of highly structured negative electrode stacks for 3D-integrated batteries is demonstrated. The stacks comprise a TiN thin film, serving as both current collector and Li-barrier layer, covered by a polycrystalline Si (poly-Si) thin film as electrode material. In comparison with planar films, these poly-Si films present a storage capacity increase of about 5× for the highest pore aspect ratio electrodes. The step coverage of poly-Si can be considerably improved by growing TiN and poly-Si into wide trenches. This results in much smoother poly-Si films and significantly improved step coverage. Further optimization of the trench dimensions should result in poly-Si films with a Li-storage capacity increase of more than one order of magnitude with respect to planar films. © 2010 The Royal Society of Chemistry.

Bibliographic Details

Loïc Baggetto; Harm C. M. Knoops; Rogier A. H. Niessen; Wilhelmus M. M. Kessels; Peter H. L. Notten

Royal Society of Chemistry (RSC)

Chemistry; Materials Science

Provide Feedback

Have ideas for a new metric? Would you like to see something else here?Let us know