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Eco-friendly photolithography using water-developable pure silk fibroin

RSC Advances, ISSN: 2046-2069, Vol: 6, Issue: 45, Page: 39330-39334
2016
  • 52
    Citations
  • 0
    Usage
  • 62
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    52
    • Citation Indexes
      51
    • Patent Family Citations
      1
      • Patent Families
        1
  • Captures
    62

Article Description

We report that pure silk fibroin can be a green and biofunctional photoresist for deep ultraviolet photolithography. All processes are entirely water-based, from resist solvent to resist removal, and rely on the phototendering effect that decreases the crystallinity of silk fibroin films by DUV exposure. Additionally, the potential decrease in activity of bio-dopants due to high-energy irradiation is irrelevant to our positive-tone lithographic method.

Bibliographic Details

Park, Joonhan; Lee, Sung-Gyu; Marelli, Benedetto; Lee, Myungjae; Kim, Taehyung; Oh, Hye-Keun; Jeon, Heonsu; Omenetto, Fiorenzo G.; Kim, Sunghwan

Royal Society of Chemistry (RSC)

Chemistry; Chemical Engineering

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