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Capacitive pressure sensing with suspended graphene-polymer heterostructure membranes

Nanoscale, ISSN: 2040-3372, Vol: 9, Issue: 44, Page: 17439-17449
2017
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Most Recent Blog

Graphene performs under pressure

Scientists have fabricated highly miniaturised pressure sensors using graphene membranes which can detect minute changes in pressure with high sensitivity, over a wide range of operating pressures.

Most Recent News

Graphene performs under pressure

Scientists have fabricated highly miniaturised pressure sensors using graphene membranes which can detect minute changes in pressure with high sensitivity, over a wide range of operating pressures.

Article Description

We describe the fabrication and characterisation of a capacitive pressure sensor formed by an ultra-thin graphene-polymer heterostructure membrane spanning a large array of micro-cavities each up to 30 μm in diameter with 100% yield. Sensors covering an area of just 1 mm show reproducible pressure transduction under static and dynamic loading up to pressures of 250 kPa. The measured capacitance change in response to pressure is in good agreement with calculations. Further, we demonstrate high-sensitivity pressure sensors by applying a novel strained membrane transfer and optimising the sensor architecture. This method enables suspended structures with less than 50 nm of air dielectric gap, giving a pressure sensitivity of 123 aF Pa mm over a pressure range of 0 to 100 kPa.

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