Spectral characteristics of plasma emission during ArF excimer laser ablation of YBaCuO
Applied Physics Letters, ISSN: 0003-6951, Vol: 54, Issue: 5, Page: 469-471
1989
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Article Description
In order to characterize the laser ablation process as it relates to the deposition of high T superconducting thin films, optical emission spectra produced during ArF excimer laser ablation of the high T superconductor YBaCuO were studied. The population of excited states within the gas phase blow-off material depends strongly on excimer laser fluence at 193 nm. Ablation using relatively low excimer laser fluences produces a significant fraction of YO in the gas phase. The plasmas derived from ablation of targets made from the high T material are similar to plasmas observed from ablation of the individual components BaCO, CuO, and YO.
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