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Influence of the oxygen stoichiometry on the structural and optical properties of reactively evaporated ZrO films

Applied Physics Letters, ISSN: 0003-6951, Vol: 63, Issue: 15, Page: 2056-2058
1993
  • 22
    Citations
  • 0
    Usage
  • 3
    Captures
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    Mentions
  • 0
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Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    22
    • Citation Indexes
      22
  • Captures
    3

Article Description

Thin ZrO films are deposited by reactive electron beam evaporation of pure zirconium metal at different oxygen partial pressures. Stoichiometry, structural composition and optical properties of these films are studied. Results from x-ray diffraction and ellipsometry show that the crystallographic phase composition and the optical properties of the films can be controlled by a proper choice of the oxygen partial pressure. In comparison with direct evaporation of ZrO, the reactive evaporation of zirconium metal improves the homogeneity of the refractive index along the film thickness thanks to an increased homogeneity in the crystallographic phase composition.

Bibliographic Details

M. Bellotto; A. Caridi; E. Cereda; G. Gabetta; M. Scagliotti; G. M. Braga Marcazzan

AIP Publishing

Physics and Astronomy

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