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Electron acceleration resonant with sheath motion in a low-pressure radio frequency discharge

Applied Physics Letters, ISSN: 0003-6951, Vol: 64, Issue: 13, Page: 1623-1625
1994
  • 12
    Citations
  • 0
    Usage
  • 4
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    12
    • Citation Indexes
      12
  • Captures
    4

Article Description

A new electron acceleration method in low-pressure radio-frequency (rf) discharges, leading to high density plasmas, is proposed. Electrons are resonantly accelerated by multiple interactions with a moving rf sheath under a specific magnetic flux density which satisfies the condition that twice the electron cyclotron frequency is equal to the rf driving frequency. Experimental evidence is presented. This technique might be useful for the generation of low-pressure high density rf plasmas.

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