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Epitaxial La-doped SrTiO on silicon: A conductive template for epitaxial ferroelectrics on silicon

Applied Physics Letters, ISSN: 0003-6951, Vol: 80, Issue: 25, Page: 4801-4803
2002
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Metrics Details

  • Citations
    61
    • Citation Indexes
      61
  • Captures
    60

Article Description

Use of an epitaxial conducting template has enabled the integration of epitaxial ferroelectric perovskites on silicon. The conducting template layer, LaSrTiO (LSTO), deposited onto (001) silicon wafers by molecular-beam epitaxy is then used to seed 001-oriented epitaxial perovskite layers. We illustrate the viability of this approach using PbZrTiO (PZT) as the ferroelectric layer contacted with conducting perovskite LaSrCoO (LSCO) electrodes. An important innovation that further facilitates this approach is the use of a low-temperature (450°C) sol-gel process to crystallize the entire ferroelectric stack. Both transmission electron microscopy and x-ray diffraction analysis indicate the LSCO/PZT/LSCO/LSTO/Si heterostructures are epitaxial. The electrical response of ferroelectric capacitors (for pulse widths down to 1 μs) measured via the underlying silicon substrate is identical to measurements made using conventional capacitive coupling method, indicating the viability of this approach. © 2002 American Institute of Physics.

Bibliographic Details

B. T. Liu; K. Maki; Y. So; V. Nagarajan; R. Ramesh; J. Lettieri; J. H. Haeni; D. G. Schlom; W. Tian; X. Q. Pan; F. J. Walker; R. A. McKee

AIP Publishing

Physics and Astronomy

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