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Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus

Applied Physics Letters, ISSN: 0003-6951, Vol: 83, Issue: 15, Page: 3081-3083
2003
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Metrics Details

  • Citations
    347
    • Citation Indexes
      347
  • Captures
    171

Article Description

A study was performed on the ultrathin single-crystalline-silicon cantilever resonators. The cantilever resonators were characterized by resonance testing in high vacuum. The results showed that the Young's modulus decreased monotonously as the cantilevers became thinner.

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