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The effect of hydrogen etching on 6H-SiC studied by temperature-dependent current-voltage and atomic force microscopy

Applied Physics Letters, ISSN: 0003-6951, Vol: 85, Issue: 9, Page: 1547-1549
2004
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Article Description

The influence of hydrogen etching on 6H-SiC was investigated using atomic force microscopy and temperature-dependent current-voltage (I-V-T) measurements. It was observed that hydrogen etching had effectively removed mechanical polishing damage at temperatures above 1250°C. The current-voltage and I-V-T measurements were used for the analysis of Schottky diode characteristics. As the annealing temperature was increased from 1250 to 1450°C, a transition from defect assisted tunneling to thermionic emission was also observed. The annealing temperature was found to reduce the reverse bias leakage current.

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