Defects and morphological changes in nanothin Cu films on Mo(100) studied by thermal helium desorption spectrometry
Journal of Applied Physics, ISSN: 0021-8979, Vol: 96, Issue: 8, Page: 4463-4474
2004
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Article Description
Vacancy-related defects and thermal stability of nanothin Cu films deposited on a Mo(100) substrate were investigating using thermal helium desorption spectrometry. Cu films were highly unstable due to the thermally-induced island formation of the films, as indicated by postdeposition annealing. The temperature was lowered by an increase of the helium implantation energy, which suggested that the island-formation process was defect-mediated. X-ray difraction measurements were also carried out which indicated that the Cu films were both fcc Cu(100) films with identical macrostrains.
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