Radio frequency sheath formation and excitation around a stepped electrode
Journal of Applied Physics, ISSN: 0021-8979, Vol: 97, Issue: 6
2005
- 21Citations
- 9Captures
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Article Description
Plasma and sheath structure around a rf excited stepped electrode is investigated. Laser-induced fluorescence dip spectroscopy is used to spatially resolve sheath fields in an argon discharge while optical emission and laser-induced fluorescence are used to measure the spatial structure of the surrounding discharge for various discharge conditions and step-junction configurations. The presence of the step perturbs the spatial structure of the fields around the step as well as the excitation in the region above the step. © 2005 American Institute of Physics.
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