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Formation of germanium nanocrystals embedded in silicon-oxygen-nitride layer

Applied Physics Letters, ISSN: 0003-6951, Vol: 89, Issue: 5
2006
  • 18
    Citations
  • 0
    Usage
  • 3
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    18
    • Citation Indexes
      18
  • Captures
    3

Article Description

The formation of germanium nanocrystals embedded in silicon-oxygen nitride with distributed charge storage elements is proposed in this work. A large memory window is observed due to isolated Ge nanocrystals in the SiON gate stack layer. The Ge nanocrystals were nucleated after high temperature oxidized SiGeN layer. The nonvolatile memory with the Ge nanocrystals embedded in SiON stack layer exhibits 4 V threshold voltage shift under 10 V write operation. Also, the manufacture technology using the sequent high-temperature oxidation of the a-Si layer acting as the blocking oxide is proposed to enhance the performance of nonvolatile memory devices. © 2006 American Institute of Physics.

Bibliographic Details

Chun Hao Tu; Hsin Chou Liu; Chia Chou Tsai; Li Ting Chang; Tseung Yuan Tseng; Simon M. Sze; Chun Yen Chang; Ting Chang Chang; Po Tsun Liu

AIP Publishing

Physics and Astronomy

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